Vacuum Pump Inlet-Exhaust Trap

Ideal for semiconductor wafer manufacturing.

15805 Mass Vac
Mass-Vac
Screen Shot 2019 03 11 At 11 11 10 Am
Mass-Vac

Mass-Vac announces a high-capacity vacuum pump inlet-exhaust trap for collecting the heavy particulates associated with semiconductor manufacturing processes.

The MV Multi-Trap 12” Vacuum Inlet Trap features all stainless steel construction and has a first stage knock-down baffle along with two stages of user selectable filter elements to provide optimum filtration.

Ideal for semiconductor wafer manufacturing, stacking two can achieve four stages of filtration capable of up to 2,500 cu.in. of solids accumulation, depending upon the process including LPCVD, PECVD, and ALD processes.

Filtration options include 4.5” and 9” elements made of:

  • Stainless steel gauze

  • Copper gauze

  • Polypropylene in 2, 5, and 20 micron sizes

  • Sodasorb

  • Activated alumina

  • Activated charcoal

  • Molecular sieve

For more information, visit www.massvac.com.

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